(Image credit: ASML)

ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025 , generating €32.7 billion in total revenue and ending the year with a €38.8 billion order backlog.

The Dutch company holds a 100% monopoly on EUV lithography and approximately 83% of the global lithography market overall, and its roadmap now spans four distinct generations of technology: DUV immersion systems that still handle the majority of layers on every advanced chip, low-NA EUV scanners that enabled the 5nm and 3nm era, High-NA EUV tools now entering early production at Intel and Samsung, and a Hyper-NA concept that remains in feasibility studies for the 2030s.

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(Image credit: ASML)

DUV immersion and low-NA EUV

ASML's DUV immersion systems are still the backbone of semiconductor manufacturing when it comes to volume production, with the company selling 131 immersion DUV tools in 2025.…